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Bulk molybdenum field emitters by inductively coupled plasma etching

Ningli Zhu1, Matthew T Cole2, William I Milne3

  • 1Institute of Microelectronics, Peking University, Beijing, 100871, P. R. China. j.chen@pku.edu.cn and Electrical Engineering Division, Department of Engineering, University of Cambridge, UK.

Physical Chemistry Chemical Physics : PCCP
|November 29, 2016
PubMed

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