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    Area of Science:

    • Optical metrology
    • Interferometry
    • Precision engineering

    Background:

    • Periodic errors in interferometers limit measurement accuracy.
    • Environmental variations and angular motion can degrade performance.
    • Existing designs often struggle with stability and precision.

    Purpose of the Study:

    • To develop a new double-path heterodyne interferometer.
    • To minimize the influence of periodic errors and ambient conditions.
    • To enhance tolerance to angular motions for improved measurement stability.

    Main Methods:

    • Utilized a double-path heterodyne interferometer with spatially separated input beams.
    • Implemented fully fiber-coupled optics with balanced beam paths.
    • Employed corner cube reflectors for enhanced angular motion tolerance.
    • Characterized nonlinearities using amplitude spectra for spline-interpolated data.

    Main Results:

    • The interferometer effectively minimized the influence of periodic errors.
    • Balanced beam paths reduced sensitivity to ambient condition variations.
    • The use of corner cube reflectors allowed for greater angular motion tolerance.
    • Periodic error amplitude was maintained within 0.63 nm, attributed to multi-reflections.

    Conclusions:

    • The developed interferometer offers improved accuracy and stability.
    • The design effectively mitigates common sources of measurement error.
    • This technology advances precision optical metrology applications.