A scanning Hall probe microscope for high resolution, large area, variable height magnetic field imaging.

Area of Science:

• Materials Science
• Physics
• Instrumentation

Background:

• Scanning probe microscopy is crucial for analyzing magnetic materials at the microscale.
• Existing techniques often require controlled environments, limiting broader applications.
• There is a need for versatile, high-resolution magnetic field mapping tools.

Purpose of the Study:

• To present a novel scanning Hall probe microscope (SHPM) designed for ambient conditions.
• To detail the instrument's capabilities, including large scan range and high spatial resolution.
• To demonstrate its utility in characterizing micro-magnet arrays for microsystem applications.

Main Methods:

• Utilized stepper motors for precise sample positioning and scanning across a large range (mm) with 0.1 μm resolution.
• Implemented protocols for variable height scanning (35 mm z-range).
• Developed microstructured Hall probes (1-5 μm) and employed a tuning fork-based force detection for sub-2 μm probe-sample distance regulation.

Main Results:

• Achieved a large scan range (mm) with high resolution (0.1 μm) in x and y directions.
• Enabled precise control of probe-sample distance (<2 μm) and variable height scanning (35 mm z-range).
• Demonstrated the capability to record local magnetic field profiles B(z).

Conclusions:

• The developed scanning Hall probe microscope is a versatile tool for ambient magnetic field measurements.
• Its capabilities are well-suited for the detailed characterization of micro-magnet arrays.
• The technology facilitates advancements in the development of micro-systems.