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A scanning Hall probe microscope for high resolution, large area, variable height magnetic field imaging.

Gorky Shaw1, R B G Kramer1, N M Dempsey1

  • 1Université Grenoble Alpes, Institut Néel, F-38042 Grenoble, France.

The Review of Scientific Instruments
|December 3, 2016
PubMed
Summary

We developed a scanning Hall probe microscope for ambient conditions, offering a large scan range and high resolution. This instrument is ideal for studying micro-magnet arrays in microsystems.

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Area of Science:

  • Materials Science
  • Physics
  • Instrumentation

Background:

  • Scanning probe microscopy is crucial for analyzing magnetic materials at the microscale.
  • Existing techniques often require controlled environments, limiting broader applications.
  • There is a need for versatile, high-resolution magnetic field mapping tools.

Purpose of the Study:

  • To present a novel scanning Hall probe microscope (SHPM) designed for ambient conditions.
  • To detail the instrument's capabilities, including large scan range and high spatial resolution.
  • To demonstrate its utility in characterizing micro-magnet arrays for microsystem applications.

Main Methods:

  • Utilized stepper motors for precise sample positioning and scanning across a large range (mm) with 0.1 μm resolution.
  • Implemented protocols for variable height scanning (35 mm z-range).
  • Developed microstructured Hall probes (1-5 μm) and employed a tuning fork-based force detection for sub-2 μm probe-sample distance regulation.

Main Results:

  • Achieved a large scan range (mm) with high resolution (0.1 μm) in x and y directions.
  • Enabled precise control of probe-sample distance (<2 μm) and variable height scanning (35 mm z-range).
  • Demonstrated the capability to record local magnetic field profiles B(z).

Conclusions:

  • The developed scanning Hall probe microscope is a versatile tool for ambient magnetic field measurements.
  • Its capabilities are well-suited for the detailed characterization of micro-magnet arrays.
  • The technology facilitates advancements in the development of micro-systems.