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A high-voltage scanning transmission electron microscope at Nagoya University
M Hibino1, H Shimoyama, S Maruse
1Department of Electronics, Faculty of Engineering, Nagoya University, Japan.
Journal of Electron Microscopy Technique
|July 1, 1989
Abstract:
A high-voltage scanning transmission electron microscope (STEM) H-1250ST of the maximum accelerating voltage of 1.25 MV was constructed at Nagoya University in 1983. The microscope, equipped with a field-emission gun, is designed with high-level STEM performance as well as conventional transmission microscopy mode operation. The aim of developing the microscope, basic design schemes, principal instrumentation, and techniques developed are described.