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Related Experiment Video

Updated: Mar 10, 2026

Design and Characterization Methodology for Efficient Wide Range Tunable MEMS Filters
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Design and Characterization Methodology for Efficient Wide Range Tunable MEMS Filters

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Modeling framework for piezoelectrically actuated MEMS tunable lenses.

Mahmoud A Farghaly, Muhammad Nadeem Akram, Einar Halvorsen

    Optics Express
    |December 14, 2016
    PubMed
    Summary
    This summary is machine-generated.

    This study presents a modeling framework for piezoelectric MEMS tunable lenses. The framework optimizes lens design for diffraction-limited performance and confirms consistent optical quality across various object distances with voltage adjustment.

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    Area of Science:

    • Optoelectromechanical systems
    • Microelectromechanical systems (MEMS)

    Background:

    • Piezoelectrically actuated Microelectromechanical systems (MEMS) tunable lenses offer advanced optical functionalities.
    • Accurate performance evaluation is crucial for optimizing their design and application.

    Purpose of the Study:

    • To develop a modeling framework for evaluating the performance of piezoelectrically actuated MEMS tunable lenses.
    • To identify optimal geometrical parameters for diffraction-limited tunable lenses with minimal F-number.

    Main Methods:

    • Utilized laminated-plate theory, linear piezoelectricity, and ray tracing to model static opto-electromechanical coupling.
    • Analyzed symmetric piezoelectric actuator configurations on clamped square or circular diaphragms.
    • Calculated optical performance and focusing capability based on object distance and actuation voltage.

    Main Results:

    • The framework successfully identified geometrical parameters for diffraction-limited tunable lenses.
    • Optical performance and focusing were quantified for various object distances and actuation voltages.
    • Confirmed that modulation transfer function remains consistent for different object distances after voltage adjustment.

    Conclusions:

    • The developed modeling framework is effective for designing and evaluating MEMS tunable lenses.
    • The findings enable the creation of high-performance tunable lenses with predictable optical characteristics.
    • This work contributes to the advancement of adaptive optical systems.