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Robust design procedure for dielectric resonator metasurface lens array.

Fabrizio Silvestri, Giampiero Gerini, Stefan M B Bäumer

    Optics Express
    |December 14, 2016
    PubMed
    Summary

    This study introduces a new design strategy for single-layer metasurface lenses using dielectric resonators. The optimized design enhances focusing performance and manufacturing robustness for microlens arrays in lithography.

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    Area of Science:

    • Optics and Photonics
    • Materials Science
    • Nanotechnology

    Background:

    • Metasurface lenses offer miniaturization and advanced optical functionalities.
    • Dielectric resonators provide low loss and high efficiency for metasurface applications.
    • Current metasurface designs often lack robustness against manufacturing imperfections.

    Purpose of the Study:

    • To develop a robust design strategy for single-layer dielectric resonator metasurface lenses.
    • To optimize resonator distribution for specific performance metrics like encircled energy, bandwidth, and field of view.
    • To enhance the tolerance of metasurface lenses to manufacturing deviations.

    Main Methods:

    • A robust optimization procedure was employed to determine resonator placement.

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  • The design strategy incorporated potential manufacturing errors.
  • The approach was applied to design an array of microlenses for maskless lithography.

    • Main Results:

    • The designed metasurface lenses demonstrated uniform focusing performance.
    • Achieved a bandwidth of 20 nm (395 nm - 415 nm) and a field of view of ±60 mrad.
    • The design exhibited increased robustness against manufacturing errors compared to analytic phase projection methods.

    Conclusions:

    • The proposed design strategy enables the creation of high-performance, robust metasurface lenses.
    • This approach is particularly suitable for applications like maskless lithography requiring precise focusing.
    • Incorporating manufacturing tolerances into the design process is crucial for practical metasurface applications.