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Updated: Mar 10, 2026

Characterization of Surface Modifications by White Light Interferometry: Applications in Ion Sputtering, Laser Ablation, and Tribology Experiments
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Precise optical surface profilometry using innovative chromatic differential confocal microscopy.

Liang-Chia Chen, Duc Trung Nguyen, Yi-Wei Chang

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    This summary is machine-generated.

    A novel double-slit chromatic confocal microscopy enables one-shot 3D surface measurement for precision manufacturing. This broadband differential method achieves sub-micrometer depth repeatability in microscopic profile generation.

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    Area of Science:

    • Optical Engineering
    • Metrology
    • Microscopy

    Background:

    • In situ automated optical inspection is crucial for precision manufacturing.
    • Microscopic surface profile generation requires high accuracy and efficiency.

    Purpose of the Study:

    • To develop a one-shot microscopic 3D surface measurement method.
    • To enhance in situ automated optical inspection capabilities for precision manufacturing.

    Main Methods:

    • Developed a broadband differential confocal method using novel double-slit chromatic confocal microscopy.
    • Implemented an innovative optical configuration generating orthogonally polarized incident light beams.
    • Detected conjugate light beams using two slits of different widths at conjugate imaging locations.

    Main Results:

    • Achieved one-shot microscopic 3D surface profile reconstruction.
    • Demonstrated sub-micrometer depth measuring repeatability.
    • Enabled in situ automated optical inspection for geometric compliance.

    Conclusions:

    • The developed method offers a highly repeatable and efficient solution for microscopic 3D surface measurement.
    • This technique is vital for ensuring strict geometric compliance in precision manufacturing applications.