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Nicolas Giraudo1, Samuel Bergdolt1, Jonas Wohlgemuth1
1Institut für Funktionelle Grenzflächen (IFG), ‡Karlsruhe Nano Micro Facility (KNMF), and §Competence Center for Material Moisture, Karlsruher Institut für Technologie (KIT) , Hermann-von-Helmholtz-Platz 1, 76344 Eggenstein-Leopoldshafen, Germany.
High-temperature resistant phosphates characterize ultrathin calcium silicate phases on silicon wafers. These phases reform at 1000 °C, showing potential for catalysis and semiconductor applications.
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