Annealing Effects of Parylene-Caulked Polydimethylsiloxane as a Substrate of Electrodes

Jinmo Jeong1, Namsun Chou2, Gihyun Lee3

  • 1School of Mechanical Engineering, Gwangju Institute of Science and Technology (GIST), Gwangju 61005, Korea. jeongjm@gist.ac.kr.

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