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Updated: Mar 9, 2026

Making Record-efficiency SnS Solar Cells by Thermal Evaporation and Atomic Layer Deposition
Published on: May 22, 2015
Development of betavoltaic cell technology production based on microchannel silicon and its electrical parameters
A A Krasnov1, V V Starkov2, S A Legotin1
1NUST "MISiS", 4, Leninskiy Prosp., 119049 Moscow, Russia.
Abstract:
In the paper a manufacturing process of three-dimensional (3D) microchannel structure by silicon (Si) anodic etching was discussed. The possibility of microchannels formation allows to increase the active area more than 100 times. In this structure the p-n junction on the whole Si surface was formed. The obtained data allowed to evaluate the characteristics of the betavoltaic converter with a 3D structure by using isotope 63Ni with a specific activity of 10Ci/g.
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