Directional elastic wave propagation in high-aspect-ratio photoresist gratings: liquid infiltration and aging

E Alonso-Redondo1, A Gueddida2, J Li3

  • 1Max Planck Institute for Polymer Research, Ackermannweg 10, 55128 Mainz, Germany. fytas@mpip-mainz.mpg.de.

Nanoscale
|January 4, 2017
PubMed

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