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Combining in-situ lithography with 3D printed solid immersion lenses for single quantum dot spectroscopy
Marc Sartison1, Simone Luca Portalupi1, Timo Gissibl2
1Institut für Halbleiteroptik und Funktionelle Grenzflächen, Center for Integrated Quantum Science and Technology (IQST) and Research Center SCoPE, University of Stuttgart, Allmandring 3, 70569 Stuttgart, Germany.
Scientific Reports
|January 7, 2017
Summary
We precisely fabricated solid immersion lenses (SILs) on semiconductor quantum dots (QDs) using advanced lithography and laser writing. This significantly improved QD light extraction and localization accuracy below 1 nm.
Area of Science:
- Nanophotonics
- Quantum Optics
- Materials Science
Background:
- Semiconductor quantum dots (QDs) are crucial for quantum information processing and optoelectronics.
- Efficient light extraction and precise localization of QDs are critical for their performance.
- Existing methods for QD manipulation and enhancement often lack deterministic precision.
Purpose of the Study:
- To develop a deterministic method for fabricating solid immersion lenses (SILs) directly onto pre-selected semiconductor quantum dots (QDs).
- To investigate the impact of these SILs on QD optical properties, including light extraction efficiency and localization accuracy.
- To analyze potential modifications to QD properties induced by the fabrication process.
Main Methods:
- Utilizing low-temperature in-situ photolithography for precise pre-selection of individual QDs with sub-2 nm accuracy.
- Employing femtosecond 3D direct laser writing to deterministically fabricate hemispherical SILs on selected QDs with sub-micrometric precision.
- Characterizing the optical performance and properties of QDs before and after SIL fabrication.
Main Results:
- Achieved deterministic fabrication of SILs on pre-selected QDs.
- Enhanced QD light extraction efficiency by a factor of 2.
- Improved QD localization accuracy to well below 1 nm due to enhanced signal-to-noise ratio and focused pumping laser.
- Observed modifications in QD properties, such as strain and variations in internal quantum efficiency, induced by the SILs.
Conclusions:
- The combined approach of low-temperature lithography and 3D laser writing enables deterministic SIL fabrication on QDs.
- This technique significantly boosts QD performance metrics, paving the way for advanced quantum devices.
- The study highlights the interplay between nanostructure fabrication and quantum emitter properties.

