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Updated: Mar 9, 2026

Sample Preparation and Experimental Design for In Situ Multi-Beam Transmission Electron Microscopy Irradiation Experiments
Published on: June 27, 2022
Cheng-Lun Wu1, Fang-Cheng Li1, Chun-Wei Pao1
1Research Center for Applied Sciences, Academia Sinica , Taipei, Taiwan.
Focused ion beam (FIB) processing causes nanostructure deformation due to mass transport. Controlling ion energy and flux allows precise control over plastic deformation for 3D nanostructure fabrication.
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