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Pull-In Effect of Suspended Microchannel Resonator Sensor Subjected to Electrostatic Actuation

Han Yan1, Wen-Ming Zhang2, Hui-Ming Jiang3

  • 1State Key Laboratory of Mechanical System and Vibration, School of Mechanical Engineering, Shanghai Jiao Tong University, Shanghai 200240, China. spondor@sjtu.edu.cn.

Sensors (Basel, Switzerland)
|January 12, 2017
PubMed

Keywords:
MEMSdynamicselectrostatic actuationinstabilityinternal fluid flowsuspended microchannel resonators

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