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Updated: Mar 8, 2026

Design and Characterization Methodology for Efficient Wide Range Tunable MEMS Filters
Published on: February 4, 2018
Mid-wave infrared narrow bandwidth guided mode resonance notch filter
Abstract:
We have designed, fabricated, and characterized a guided mode resonance notch filter operating in the technologically vital mid-wave infrared (MWIR) region of the electromagnetic spectrum. The filter provides a bandstop at λ≈4.1 μm, with a 12 dB extinction on resonance. In addition, we demonstrate a high transmission background (>80%), less than 6% transmission on resonance, and an ultra-narrow bandwidth transmission notch (10 cm-1). Our filter is optically characterized using angle- and polarization-dependent Fourier transform infrared spectroscopy, and simulated using rigorous coupled-wave analysis (RCWA) with excellent agreement between simulations and our experimental results. Using our RCWA simulations, we are able to identify the optical modes associated with the transmission dips of our filter. The presented structure offers a potential route toward narrow-band laser filters in the MWIR.
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