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Related Experiment Video

Updated: Mar 8, 2026

Design and Characterization Methodology for Efficient Wide Range Tunable MEMS Filters
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A Differential Resonant Accelerometer with Low Cross-Interference and Temperature Drift.

Bo Li1, Yulong Zhao2, Cun Li3

  • 1State Key Laboratory for Manufacturing System Engineering, Xi'an Jiaotong University, Xi'an 710049, China. li.bo.123.666@stu.xjtu.edu.cn.

Sensors (Basel, Switzerland)
|January 21, 2017
PubMed
Summary
This summary is machine-generated.

This study presents a novel resonant accelerometer using quartz tuning forks and a differential silicon substrate. The design significantly reduces temperature drift and cross-interference for high-performance sensing applications.

Keywords:
accelerometerlow cross-interferencelow temperature driftquartz resonator

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Area of Science:

  • Sensor Technology
  • Mechanical Engineering
  • Materials Science

Background:

  • Traditional accelerometers often suffer from temperature drift and cross-interference.
  • Improving the accuracy and stability of accelerometers is crucial for various applications.

Purpose of the Study:

  • To develop a high-performance resonant accelerometer with low cross-interference and temperature drift.
  • To introduce a novel differential silicon substrate for enhanced accelerometer performance.

Main Methods:

  • Theoretical calculation of quartz double-ended tuning fork (DETF) natural frequency.
  • Finite Element Method (FEM) analysis to verify axial stress under acceleration.
  • Fabrication and experimental testing of the accelerometer prototype.

Main Results:

  • The novel differential silicon substrate significantly reduced temperature drift and cross-interference.
  • Experimental results showed cross-interference below 0.03% and temperature drift of approximately 18.16 ppm/°C.
  • The accelerometer achieved digital output and high performance.

Conclusions:

  • The proposed differential silicon substrate design effectively mitigates temperature drift and cross-interference in resonant accelerometers.
  • The developed accelerometer demonstrates superior performance characteristics suitable for demanding applications.
  • This work contributes to the advancement of precision inertial sensing technology.