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Updated: Mar 8, 2026

Preparation of Silicon Nanowire Field-effect Transistor for Chemical and Biosensing Applications
Published on: April 21, 2016
Core-shell homojunction silicon vertical nanowire tunneling field-effect transistors
Jun-Sik Yoon1, Kihyun Kim1, Chang-Ki Baek1,2
1Department of Creative IT Engineering and Future IT Innovation Lab, Pohang University of Science and Technology, Pohang 790-784, Korea.
We developed novel core-shell silicon vertical nanowire tunneling field-effect transistors (TFETs) using CMOS technology. These TFETs offer improved performance, including lower subthreshold swing and higher on-state current, for efficient low-power electronics.
Area of Science:
- Semiconductor Device Physics
- Nanotechnology
- Materials Science
Background:
- Conventional tunneling field-effect transistors (TFETs) face challenges in achieving optimal performance for low-power applications.
- Improving the surface-to-volume ratio in TFETs is crucial for enhancing carrier tunneling and device efficiency.
Purpose of the Study:
- To propose and investigate novel three-terminal core-shell (CS) silicon vertical nanowire tunneling field-effect transistors (TFETs).
- To evaluate the performance enhancements of CS TFETs compared to conventional TFETs, focusing on subthreshold swing and on-state current.
Main Methods:
- Fabrication of CS silicon vertical nanowire TFETs using conventional CMOS technology.
- Analysis of device characteristics, including subthreshold swing (SS), on-state current, and off-state current.
- Parametric study involving nanowire height, equivalent oxide thickness (EOT), and nanowire array configuration.
Main Results:
- CS TFETs exhibit a significantly lower subthreshold swing (SS) and higher on-state current due to their high surface-to-volume ratio.
- On-state current is tunable by adjusting nanowire height, EOT, and array density.
- Off-state current can be managed via selective epitaxial growth for power savings.
- Optimized CS TFETs (0.8 nm EOT, aspect ratio 20) achieve SS below 60 mV/dec and superior on/off ratios at various voltages.
Conclusions:
- Core-shell silicon vertical nanowire TFETs offer a promising pathway for next-generation low-power electronic devices.
- The proposed TFET architecture provides enhanced performance with potential for low fabrication cost and high device density.
- These devices are suitable for applications demanding high efficiency and minimal power consumption.
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