Finite-Element Analysis of Bulk-Acoustic-Wave Devices: A Review of Model Setup and Applications

In this paper, the principles of finite-element modeling for the electroacoustic simulation of bulk-acoustic-wave devices will be summarized. We will outline the model setup including governing equations and boundary conditions, as well as its efficient computer implementation. Particular emphasis will be given to tailoring the model dimension to the specific requirements of the desired investigation. As 3-D simulations still require a major effort, it will be illustrated that various aspects of device physics and design can already be addressed by fast and efficient 2-D simulations. Multiple theoretical and experimental evidence will be presented to demonstrate the validity of the modeling concepts. Based on various examples, it will be sketched how to benefit from numerical simulations for understanding fundamental effects, designing devices for actual products, and exploring novel technologies.