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    This study presents a novel, cost-effective optical sensor for high-speed displacement measurements. The sensor achieves precise measurements from picometers to nanometers, ideal for ultrasonic applications.

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    Area of Science:

    • Optical Metrology
    • Sensor Technology
    • Nanotechnology

    Background:

    • High-speed displacement measurement is crucial for applications like ultrasonic transducers.
    • Existing experimental schemes can be complex and costly.
    • There is a need for simpler, lower-cost, high-performance optical sensors.

    Purpose of the Study:

    • To design and evaluate a low-noise, high-speed optical sensor.
    • To enable precise displacement measurements over a wide frequency range.
    • To demonstrate the sensor's utility in characterizing ultrasonic piezoelectric transducers.

    Main Methods:

    • Simultaneous detection of four phase-shifted interferograms using four high-speed photodiodes.
    • Integration of high-speed, low-noise transimpedance amplifiers.
    • Optimization of optical and electronic design for high-speed interferometry.

    Main Results:

    • The developed optical sensor provides two output signals in quadrature.
    • Displacement measurements were achieved in the range of 38 pm to 32 nm.
    • Measurements demonstrated a 6% relative uncertainty at frequencies from 1 to 2 MHz.

    Conclusions:

    • The sensor offers a simpler and lower-cost alternative for high-speed displacement interferometry.
    • Its performance is suitable for characterizing ultrasonic devices.
    • The design is optimized for broad operating frequency ranges and low noise.