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    Area of Science:

    • Materials Science and Engineering
    • Optics and Photonics
    • Laser Physics

    Background:

    • Traditional laser processing of fused silica often utilizes continuous wave (CW) radiation.
    • Limitations exist in achieving high precision and geometric independence with CW lasers.
    • Pulsed laser radiation offers unique light-matter interaction dynamics.

    Purpose of the Study:

    • To investigate the application of a high-power Q-switched carbon dioxide (CO2) laser for fused silica processing.
    • To evaluate the advantages of pulsed laser radiation over CW radiation for optical manufacturing.
    • To demonstrate flexible manufacturing and form correction of optics using this laser-based approach.

    Main Methods:

    • Utilized a high-power Q-switched CO2 laser source with a maximum output power of 200 W.
    • Investigated the light-matter interaction effects of pulsed laser radiation.
    • Performed material ablation and laser polishing on fused silica.

    Main Results:

    • Achieved high ablation rates of up to 2.35 mm³/s for fused silica.
    • Demonstrated precise local ablation in the vertical dimension down to 3 nm.
    • Confirmed that the process is nearly independent of surface geometry.

    Conclusions:

    • High-power Q-switched CO2 laser processing is effective for precise fused silica ablation and surface modification.
    • Pulsed laser radiation offers advantages due to high peak power and controlled average power.
    • The developed laser-based process is suitable for flexible optics manufacturing, form correction, and can be extended to other glass materials.