Low vibration laboratory with a single-stage vibration isolation for microscopy applications

Bert Voigtländer1, Peter Coenen1, Vasily Cherepanov1

  • 1Peter Grünberg Institut (PGI-3), Forschungszentrum Jülich, 52425 Jülich, Germany.

Summary

A new low vibration laboratory for microscopy was constructed using a 100-ton floating foundation on air springs. This advanced system achieves extremely low vibration levels, ideal for sensitive microscopy applications.

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