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Non-equilibrium Microwave Plasma for Efficient High Temperature Chemistry

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System for time-resolved laser absorption spectroscopy and its application to high-power impulse magnetron

P Adámek¹, J Olejníček¹, Z Hubička¹

¹Institute of Physics v.v.i., Academy of Sciences of the Czech Republic, Na Slovance 2, 182 21 Prague 8, Czech Republic.

The Review of Scientific Instruments

|March 3, 2017

Summary

A new time-resolved laser absorption spectroscopy (TR-LAS) apparatus diagnoses pulsed plasma with sub-microsecond resolution. This method enables simultaneous measurement of particle density and kinetic temperature in periodic plasma processes.

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High-speed Continuous-wave Stimulated Brillouin Scattering Spectrometer for Material Analysis

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Area of Science:

Plasma Physics
Spectroscopy
Materials Science

Background:

Pulsed plasma discharges are crucial in various technological applications.
Accurate diagnostics of transient plasma properties are essential for process optimization.
Existing laser absorption spectroscopy (LAS) methods often lack the temporal resolution required for pulsed plasmas.

Purpose of the Study:

To develop and construct an apparatus for time-resolved tunable diode laser absorption spectroscopy (TR-LAS).
To extend continuous-wave LAS methods to a direct triggering method for pulsed plasma diagnostics.
To enable high-time-resolution measurements of plasma species' temporal evolution.

Main Methods:

Development of a TR-LAS apparatus based on repetitive sampling.
Extension of continuous-regime LAS to a direct triggering method.
Application of TR-LAS for diagnostics of argon metastable species.

Main Results:

The developed TR-LAS method achieves time resolution less than 1 μs.
Simultaneous measurement of particle density and kinetic temperature is demonstrated.
Temporal evolution of argon metastable species was successfully measured during magnetron sputtering.

Conclusions:

The TR-LAS apparatus provides a powerful tool for diagnosing pulsed plasma processes.
The method is suitable for periodic plasma applications, including pulsed plasma discharges.
TR-LAS enables detailed insights into plasma dynamics during thin film deposition.