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Shearing interference microscope for step-height measurements.

Hưng-Xuân Trịnh¹, Shyh-Tsong Lin¹, Liang-Chia Chen²

¹Department of Electro-optical Engineering, National Taipei University of Technology, Taipei City, Taiwan.

Journal of Microscopy

|March 8, 2017

Summary

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This summary is machine-generated.

A novel shearing interference microscope with a Savart prism offers precise step-height inspection. This innovative microscope achieves high measurement repeatability for accurate surface profiling.

Area of Science:

Optical Metrology
Microscopy
Surface Profilometry

Background:

Accurate measurement of step-heights is crucial in various scientific and industrial applications.
Traditional microscopy techniques may lack the precision required for nanoscale surface characterization.
Interference microscopy offers high-resolution surface profiling capabilities.

Purpose of the Study:

To propose and demonstrate a shearing interference microscope utilizing a Savart prism for step-height inspection.
To introduce the configuration and measurement theory of the developed microscope.
To validate the performance and repeatability of the proposed instrument through experimental results.

Main Methods:

A shearing interference microscope was designed using a Savart prism as the shear plate.

Keywords:

Phase-scanning phase-shifting shearing interferometer microscope step-height

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Two measurement modes were employed: phase-shifting (narrowband source, quarter-wavelength range) and phase-scanning (broadband source, micrometre range).

The microscope configuration involves light propagation through the Savart prism and microscopic system to illuminate the sample, followed by a return path to generate interference patterns.

Main Results:

Experimental setup was successfully implemented.
The microscope demonstrated the ability to generate shearing interference patterns for step-height analysis.
Experimental results verified the validity and high measurement repeatability of the proposed microscope.

Conclusions:

The Savart prism-based shearing interference microscope is a viable tool for precise step-height measurement.
The dual-mode capability (phase-shifting and phase-scanning) allows for versatile application across different measurement ranges.
The demonstrated high repeatability confirms the reliability of this novel microscopy technique for surface inspection.