Novel structure of carbon nanotube micro electrode for high-resolution stimulation of neurons

This paper proposes a novel method to fabricate high resolution flexible electrodes. Among the steps, the carbon nanotube (CNT) electrodes synthesized facing down shows impedance improvement of about 90 times comparing with the normal facing up synthesized samples. Meanwhile, section impedance of electrodes is also defined in this paper to compare the area efficiency of impedance between electrodes with different sizes. In addition and to the best of our knowledge, high performance electrodes embedded inside parylene is reported for the first time taking into consideration the hydrophobicity change of the CNT surface.