High quality transparent conductive Ag-based barium stannate multilayer flexible thin films

Transparent conductive multilayer thin films of silver (Ag)-embedded barium stannate (BaSnO₃) structures have been deposited onto flexible polycarbonate substrates by magnetron sputtering at room temperature to develop an indium free transparent flexible electrode. The effect of thicknesses of Ag mid-layer and barium stannate layers on optical and electrical properties were investigated, and the mechanisms of conduction and transmittance were discussed. The highest value of figure of merit is 25.5 × 10^-3 Ω^-1 for the BaSnO₃/Ag/BaSnO₃ multilayer flexible thin films with 9 nm thick silver mid-layer and 50 nm thick barium stannate layers, while the average optical transmittance in the visible range from 380 to 780 nm is above 87%, the resistivity is 9.66 × 10^-5 Ω · cm, and the sheet resistance is 9.89 Ω/sq. The change rate of resistivity is under 10% after repeated bending of the multilayer flexible thin films. These results indicate that Ag-based barium stannate multilayer flexible thin films can be used as transparent flexible electrodes in various flexible optoelectronic devices.