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In 1931, physicist Ernst Ruska—building on the idea that magnetic fields can direct an electron beam just as lenses can direct a beam of light in an optical microscope—developed the first prototype of the electron microscope. This development led to the development of the field of electron microscopy. In the transmission electron microscope (TEM), electrons are produced by a hot tungsten element and accelerated by a potential difference in an electron gun, which gives them up to 400...
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A scanning electron microscope (SEM) is used to study the surface features of a sample by using an electron beam that scans the sample surface in a two-dimensional manner. Typically, areas between ~1 centimeter to 5 micrometers in width can be imaged. SEM can be used to image bacteria, viruses, tissues as well as larger samples like insects. Conventional SEM gives a magnification ranging from 20X to 30,000X and spatial resolution of 50 to 100 nanometers.
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Preparation and Observation of Thick Biological Samples by Scanning Transmission Electron Tomography
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X-ray absorption in pillar shaped transmission electron microscopy specimens.

H Bender1, F Seidel1, P Favia1

  • 1Imec, Kapeldreef 75, 3001 Leuven, Belgium.

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|March 16, 2017
PubMed
Summary

X-ray absorption in pillar-shaped transmission electron microscopy (TEM) specimens is modeled, revealing reduced absorption effects compared to planar samples. This study offers a practical absorption correction approach for TEM pillar analysis.

Keywords:
EDS X-ray tomographyHfO(2)Pillar TEM specimenSiGeTransmission electron microscopyX-ray absorption

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Area of Science:

  • Materials Science
  • Analytical Chemistry
  • Physics

Background:

  • X-ray absorption significantly impacts quantitative analysis in transmission electron microscopy (TEM).
  • Pillar-shaped specimens are increasingly used in TEM for advanced material characterization.
  • Accurate absorption correction is crucial for reliable elemental quantification in 3D TEM analyses.

Purpose of the Study:

  • To model X-ray absorption dependence on position within pillar-shaped TEM specimens.
  • To develop and validate an absorption correction method for pillar samples.
  • To compare absorption effects in pillars versus planar specimens.

Main Methods:

  • Modeling X-ray absorption for single and multiple detector configurations.
  • Deriving universal curves for relative X-ray intensities based on absorption levels.
  • Experimental verification using HfO2 and SiGe pillar samples.

Main Results:

  • Universal curves for X-ray absorption in pillars were derived, applicable to any pillar diameter.
  • Absorption correction for weakly and medium-absorbed X-rays is nearly constant in 360° X-ray tomography configurations.
  • Absorption effects in pillars are approximately three times less significant than in planar specimens of equivalent thickness.

Conclusions:

  • A practical absorption correction approach for pillar-shaped TEM samples was proposed.
  • The study demonstrates that absorption effects are less critical in pillar specimens than previously assumed.
  • The findings facilitate more accurate quantitative analysis in advanced TEM applications.