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Updated: Mar 5, 2026
Patterning via Optical Saturable Transitions - Fabrication and Characterization
Published on: December 11, 2014
Simultaneous Patterning of Independent Metal/Metal Oxide Multi-Layer Films Using Two-Tone Photo-Acid Generating
Christopher E J Cordonier1, Hideo Honma2
1Materials & Surface Engineering Research Institute, Kanto Gakuin University, 1-1-1 Fukuura, Kanazawa, Yokohama 236-8501, Japan. chris@kanto-gakuin.ac.jp.
Abstract:
(1) The photo-induced solubility and positive-tone direct photo-patterning of iron, copper and lanthanides chelated with 4-(2-nitrobenzyloxycarbonyl)catechol (NBOC) or 4-(6-nitroveratryloxycarbonyl)catechol (NVOC) was investigated. Photo-patterning of iron, copper, cerium, samarium, europium, terbium, dysprosium, holmium, erbium and lutetium complexes was accomplished. Continuous films were formed by the pyrolysis of metal complex films at 500 °C. (2) Based on the difference in the photo-reaction excitation wavelength profile of NBOC and NVOC complexes, a short and simple method for simultaneous micro-patterning of two independent films on each side of a transparent glass substrate was developed. Using the developed procedure, indium tin oxide and/or titanium oxide films were formed on each side of a quartz substrate without use of resist or etching.
