Hamed Sadeghian1, Rodolf Herfst1, Bert Dekker1
1Department of Optomechatronics, Netherlands Organization for Applied Scientific Research, TNO, Delft, The Netherlands.
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Parallelizing atomic force microscopy (AFM) instruments through miniaturization significantly boosts throughput for large-scale nanometrology. This approach enables faster, more comprehensive analysis of samples like semiconductor wafers and biological cells.
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