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Updated: Aug 9, 2026

Electron Channeling Contrast Imaging for Rapid III-V Heteroepitaxial Characterization
Published on: July 17, 2015
Electron emission projection imager
Stanislav S Baturin1, Sergey V Baryshev2
1Department of Physics, The University of Chicago, 5720 S. Ellis Ave., Chicago, Illinois 60637, USA.
Abstract:
A new projection type imaging system is presented. The system can directly image the field emission site distribution on a cathode surface by making use of anode screens in the standard parallel plate configuration. The lateral spatial resolution of the imager is on the order of 1-10 μm. The imaging sensitivity to the field emission current can be better than the current sensitivity of a typical electrometer, i.e., less than 1 nA.
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