Transfer standard for traceable dynamic calibration of stroboscopic scanning white light interferometer.

Area of Science:

• Nanotechnology
• Metrology
• Materials Science

Background:

• Accurate quality control of nano-microelectromechanical systems (N-MEMS) requires precise calibration of dynamic behavior.
• Reconstructed images of moving samples often exhibit distortions, necessitating reliable calibration methods for out-of-plane nano-videos.

Purpose of the Study:

• To develop a calibration method for stroboscopic scanning white light interferometry (SSWLI) data, addressing variations in speed and amplitude across the field of view.
• To establish confidence limits for SSWLI measurements of oscillating N-MEMS devices.

Main Methods:

• Utilizing an off-resonance driven quartz tuning fork as a traceable transfer standard.
• Introducing a range of frequencies and out-of-plane amplitudes into the SSWLI field of view using the tuning fork.
• Employing optical surface properties similar to N-MEMS devices for the transfer standard.

Main Results:

• The proposed method enables calibration of SSWLI data for N-MEMS with varying dynamic characteristics.
• Confidence limits can be established for the obtained measurements.
• The quartz tuning fork serves as an effective transfer standard without requiring a separate reference surface.

Conclusions:

• The quartz tuning fork method provides a traceable and versatile approach for calibrating SSWLI measurements of N-MEMS.
• This technique facilitates global standards and inter-device comparisons for oscillating N-MEMS.
• Accurate calibration is essential for reliable quality control and performance evaluation of N-MEMS.