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Updated: Sep 3, 2026

Single-Digit Nanometer Electron-Beam Lithography with an Aberration-Corrected Scanning Transmission Electron Microscope
10:25

Single-Digit Nanometer Electron-Beam Lithography with an Aberration-Corrected Scanning Transmission Electron Microscope

Published on: September 14, 2018

Twenty years after: How "Aberration correction in the STEM" truly placed a "A synchrotron in a Microscope"

Quentin M Ramasse1

  • 1SuperSTEM Laboratory, SciTech Daresbury Campus, Keckwick Lane, Daresbury WA4 4AD, United Kingdom..

Ultramicroscopy
|April 8, 2017
PubMed

Keywords:
Aberration-correctionElectron energy loss spectroscopyScanning transmission electron microscopy

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