Peng-Zhi Li1,2, Xiao-Dong Wang3, Yong-Xin Sui4
1Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130033, China. lipengzhi@ciomp.ac.cn.
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This study introduces a new framework for piezoelectric actuated phase shifters, achieving high accuracy and repeatability. The developed system demonstrates excellent performance for precise phase shifting applications.
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