Atomic layer deposition of Cu(i) oxide films using Cu(ii) bis(dimethylamino-2-propoxide) and water

J R Avila1, A W Peters, Zhanyong Li

  • 1Department of Chemistry, Northwestern University, 2145 Sheridan Road, Evanston, Illinois 60208, USA. o-farha@northwestern.edu j-hupp@northwestern.edu.