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Mass Analyzers: Overview
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Updated: Mar 3, 2026

Fabrication and Characterization of High-Q Silicon Nitride Membrane Resonators
Published on: August 8, 2025
In-Bok Baek1,2, Sangwon Byun2,3, Bong Kuk Lee2
1Department of Physics, Research Institute for Natural Sciences, Hanyang University, 222 Wangsimri-ro, Seongdonggu, Seoul, 04763, Korea.
Researchers achieved sub-attogram per Hertz mass sensitivity using silicon microbeam resonators, a breakthrough for micro-electromechanical systems (MEMS) mass sensors. Fabrication improvements enhanced resonator performance and revealed unique buckling behaviors under mass loading.
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