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Related Experiment Video

Updated: Mar 3, 2026

Thermal Measurement Techniques in Analytical Microfluidic Devices
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A Low-Power Thermal-Based Sensor System for Low Air Flow Detection.

Akm Arifuzzman1, Mohammad Rafiqul Haider2, David B Allison3

  • 1Electrical and Computer Engineering, The University of Alabama at Birmingham, Birmingham, Alabama 35294, USA, arif@uab.edu.

Analog Integrated Circuits and Signal Processing
|April 25, 2017
PubMed
Summary

Researchers developed a low-power thermal air flow sensor for biomedical uses. This accurate sensor detects minimal air flow rates, ideal for medical devices.

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Area of Science:

  • Sensor Technology
  • Biomedical Engineering
  • Microfluidics

Background:

  • Accurate detection of low air flow rates is critical for automotive and biomedical applications.
  • Existing sensors may lack the required sensitivity, accuracy, or power efficiency for certain biomedical uses.

Purpose of the Study:

  • To develop a low-power, high-accuracy thermal-based air flow sensor system for biomedical applications.
  • To design and simulate a novel sensor and its associated readout circuit.

Main Methods:

  • A thermal-based air flow sensor was designed, comprising a heater and temperature sensors to detect temperature differences caused by laminar air flow.
  • COMSOL MultiPhysics software was used for simulating laminar flow and heat transfer physics.
  • A current-controlled ring oscillator circuit was designed using a 130-nm standard CMOS process for sensor readout.

Main Results:

  • The simulated sensor demonstrated the capability to detect air flow rates as low as 0.0064 m/sec.
  • The readout circuit exhibited low-power consumption (22.6 µW at 800 mV) and a small area.
  • High linearity was observed between the ring oscillator's output frequency and temperature sensor resistance changes (R² = 0.9987).

Conclusions:

  • The developed thermal air flow sensor and low-power readout circuit are highly suitable for biomedical applications.
  • The system's low power dissipation, high linearity, and small dimensions meet key requirements for portable and implantable biomedical devices.