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Single-shot areal profilometry using hyperspectral interferometry with a microlens array.

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    A novel hyperspectral interferometry (HSI) technique enables rapid, single-shot measurement of surface profiles. This improved HSI system offers a significantly larger depth range and pixel utilization for efficient 3D surface analysis.

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    Area of Science:

    • Optical Metrology
    • Surface Characterization
    • Interferometry

    Background:

    • Accurate surface profiling is crucial for various industrial applications.
    • Existing hyperspectral interferometry (HSI) methods face limitations in pixel efficiency and depth range.
    • Rapid data acquisition is essential in non-cooperative environments.

    Purpose of the Study:

    • To introduce a single-shot technique for measuring areal profiles on optically smooth and stepped surfaces.
    • To enhance the efficiency and depth range of hyperspectral interferometry.
    • To enable rapid surface data acquisition in challenging environments.

    Main Methods:

    • Development of a novel hyperspectral interferometry (HSI) system.
    • Integration of a 2-D microlens array to improve pixel utilization.
    • Utilizing white-light interferometry as input for a hyperspectral imaging system.

    Main Results:

    • Achieved a >20-fold increase in pixel utilization compared to previous HSI implementations.
    • Established a 35 × 35 channel system for comprehensive surface measurement.
    • Demonstrated an unambiguous depth range of 0.88 mm.

    Conclusions:

    • The developed HSI technique provides a significant advancement in rapid 3D surface metrology.
    • The enhanced pixel utilization and depth range overcome limitations of prior HSI systems.
    • This method is suitable for applications requiring fast and accurate surface profiling in demanding conditions.