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Yifei Meng1,2, Jian-Min Zuo1,2
1Department of Materials Science and Engineering, University of Illinois at Urbana-Champaign, 1304 W. Green Street, Urbana, IL 61801, USA.
A new scanning electron nanodiffraction technique reconstructs 3D nanostructures. This method reveals grain morphology and crystallographic orientation in materials like TiN thin films.
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