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Published on: August 15, 2014
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Nonlinear Parameter Identification of a Resonant Electrostatic MEMS Actuator.
Majed S Al-Ghamdi1, Ayman M Alneamy2, Sangtak Park3
1Department of Systems Design Engineering, University of Waterloo, Waterloo, ON N2L 3G1, Canada. malghamd@uwaterloo.ca.
Sensors (Basel, Switzerland)
|May 16, 2017
Summary
This study explores resonances in electrostatic microelectromechanical systems (MEMS) actuators. A validated one degree of freedom (1-DOF) Duffing oscillator model accurately predicts experimental actuator behavior.
Area of Science:
- Mechanical Engineering
- Electrical Engineering
- Physics
Background:
- Microelectromechanical Systems (MEMS) actuators are crucial components in various devices.
- Understanding their resonant behaviors, such as superharmonic and subharmonic resonances, is essential for reliable operation.
- Direct excitation methods are commonly used to study MEMS actuator dynamics.
Purpose of the Study:
- To experimentally investigate primary superharmonic (order two) and subharmonic (order one-half) resonances in an electrostatic MEMS actuator.
- To identify parameters for a generalized Duffing oscillator model that represents the MEMS actuator.
- To validate the model's predictions against experimental measurements.
Main Methods:
- Experiments were conducted on an electrostatic MEMS actuator under direct excitation in a soft vacuum environment.
- Squeeze-film damping was minimized by operating in soft vacuum.
- Actuator response was measured optically using a laser vibrometer.
- A one degree of freedom (1-DOF) generalized Duffing oscillator model was identified and its parameters determined.
- Noise spectral density for process (actuation voltage) and measurement noise was also identified.
Main Results:
- Experimental data for superharmonic and subharmonic resonances were obtained.
- The identified 1-DOF Duffing oscillator model parameters closely matched the experimental results.
- The model successfully predicted the actuator's resonant behavior.
- The noise characteristics of the system were quantified.
Conclusions:
- The generalized Duffing oscillator model provides an accurate representation of the electrostatic MEMS actuator's dynamics, particularly its resonant behaviors.
- Experimental investigation under controlled conditions (soft vacuum) and optical measurement techniques are effective for characterizing MEMS actuator resonances.
- The identified model and noise characteristics are valuable for the design and simulation of MEMS devices.
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