Moment fluid equations for ions in weakly ionized plasma

Area of Science:

• Plasma Physics
• Computational Physics

Background:

• Existing fluid models for weakly ionized plasma often lack accuracy in collision term approximations.
• Incorporating ion energy equations is crucial for a comprehensive fluid model.

Purpose of the Study:

• To propose a novel one-dimensional fluid model for ions in weakly ionized plasma.
• To enhance the accuracy of fluid models by improving collision term approximations and including ion energy equations.

Main Methods:

• Developed a one-dimensional fluid model incorporating refined collision terms derived from Monte Carlo kinetic model simulations.
• Included the ion energy equation and used a simplified ion velocity distribution function for closure.
• Validated the model against particle-in-cell Monte Carlo simulations for capacitively coupled radio-frequency discharges.

Main Results:

• The proposed fluid model demonstrates good agreement with particle-in-cell Monte Carlo simulation results.
• The model's accuracy was confirmed across a wide range of radio-frequency discharge conditions.
• An approximation for the ion velocity distribution function relevant to these discharges was discussed.

Conclusions:

• The enhanced one-dimensional fluid model provides a more accurate representation of ion behavior in weakly ionized plasmas.
• The inclusion of improved collision terms and the ion energy equation is vital for accurate fluid simulations.
• The model serves as a valuable tool for studying radio-frequency discharges.