Jove
Visualize
Contact Us
JoVE
x logofacebook logolinkedin logoyoutube logo
ABOUT JoVE
OverviewLeadershipBlogJoVE Help Center
AUTHORS
Publishing ProcessEditorial BoardScope & PoliciesPeer ReviewFAQSubmit
LIBRARIANS
TestimonialsSubscriptionsAccessResourcesLibrary Advisory BoardFAQ
RESEARCH
JoVE JournalMethods CollectionsJoVE Encyclopedia of ExperimentsArchive
EDUCATION
JoVE CoreJoVE BusinessJoVE Science EducationJoVE Lab ManualFaculty Resource CenterFaculty Site
Terms & Conditions of Use
Privacy Policy
Policies

Related Concept Videos

You might also read

Related Articles

Articles linked to this work by shared authors, journal, and citation graph.

Sort by
Same author

Correlation Study of the Spin-Orbit State-Resolved Scattering of Al(<sup>2</sup>P) in Oxidation Reaction and Nonreactive Collision.

The journal of physical chemistry. A·2023
Same author

Hybrid QUS Radiomics: A Multimodal-Integrated Quantitative Ultrasound Radiomics for Assessing Ambulatory Function in Duchenne Muscular Dystrophy.

IEEE journal of biomedical and health informatics·2023
Same author

RCCD1 promotes breast carcinogenesis through regulating hypoxia-associated mitochondrial homeostasis.

Oncogene·2023
Same author

Genome resources for the elite bread wheat cultivar Aikang 58 and mining of elite homeologous haplotypes for accelerating wheat improvement.

Molecular plant·2023
Same author

Robot-assisted thoracoscopic surgery for mediastinal tumours in children: a single-centre retrospective study of 149 patients.

European journal of cardio-thoracic surgery : official journal of the European Association for Cardio-thoracic Surgery·2023
Same author

Fatty acids and lipid mediators in inflammatory bowel disease: from mechanism to treatment.

Frontiers in immunology·2023

Related Experiment Video

Updated: Mar 2, 2026

Atomically Traceable Nanostructure Fabrication
12:35

Atomically Traceable Nanostructure Fabrication

Published on: July 17, 2015

9.3K

Ultrahigh Resolution Titanium Deep Reactive Ion Etching.

Bryan W K Woo1, Shannon C Gott1, Ryan A Peck1

  • 1Department of Mechanical Engineering, ‡Center for Nanoscale Science and Engineering, §Central Facility for Advanced Microscopy and Microanalysis, ∥Department of Bioengineering, and ⊥Materials Science and Engineering Program, University of California, Riverside , Riverside, California 92521, United States.

ACS Applied Materials & Interfaces
|May 24, 2017
PubMed
Summary
This summary is machine-generated.

Researchers developed an ultrahigh resolution deep reactive ion etching process for titanium, enabling microelectromechanical systems with 150 nm features. This advancement significantly enhances titanium MEMS capabilities, especially for medical devices.

Keywords:
deep reactive ion etchinghigh-aspect-rationanofabricationnanopatterningtitanium

More Related Videos

In Vitro Multiparametric Cellular Analysis by Micro Organic Charge-modulated Field-effect Transistor Arrays
10:05

In Vitro Multiparametric Cellular Analysis by Micro Organic Charge-modulated Field-effect Transistor Arrays

Published on: September 20, 2021

2.9K
Real-Time DC-dynamic Biasing Method for Switching Time Improvement in Severely Underdamped Fringing-field Electrostatic MEMS Actuators
11:44

Real-Time DC-dynamic Biasing Method for Switching Time Improvement in Severely Underdamped Fringing-field Electrostatic MEMS Actuators

Published on: August 15, 2014

10.8K

Related Experiment Videos

Last Updated: Mar 2, 2026

Atomically Traceable Nanostructure Fabrication
12:35

Atomically Traceable Nanostructure Fabrication

Published on: July 17, 2015

9.3K
In Vitro Multiparametric Cellular Analysis by Micro Organic Charge-modulated Field-effect Transistor Arrays
10:05

In Vitro Multiparametric Cellular Analysis by Micro Organic Charge-modulated Field-effect Transistor Arrays

Published on: September 20, 2021

2.9K
Real-Time DC-dynamic Biasing Method for Switching Time Improvement in Severely Underdamped Fringing-field Electrostatic MEMS Actuators
11:44

Real-Time DC-dynamic Biasing Method for Switching Time Improvement in Severely Underdamped Fringing-field Electrostatic MEMS Actuators

Published on: August 15, 2014

10.8K

Area of Science:

  • Materials Science
  • Nanotechnology
  • Microelectromechanical Systems (MEMS)

Background:

  • Titanium (Ti) is a promising material for MEMS due to its unique properties.
  • Current deep reactive ion etching (DRIE) processes for Ti are limited to minimum feature sizes (MFS) of 750 nm.
  • Reducing MFS to the submicrometer range is crucial for advanced device miniaturization and novel functionalities.

Purpose of the Study:

  • To extend titanium DRIE to the deep submicrometer scale.
  • To develop an ultrahigh resolution (UHR) Ti DRIE process.
  • To enable fabrication of high-aspect-ratio (HAR) structures with significantly reduced MFS.

Main Methods:

  • Investigated the effects of key process parameters on Ti etch performance.
  • Developed a novel UHR Ti DRIE process based on the understanding gained.
  • Fabricated HAR structures in bulk Ti substrates using the developed process.

Main Results:

  • Demonstrated fabrication of HAR structures in Ti with 150 nm MFS.
  • Achieved smooth vertical sidewalls (88°), etch rate of 587 nm/min, and mask selectivity of 11.1.
  • Achieved a fivefold improvement in MFS over previous processes and a 29-fold improvement over others.

Conclusions:

  • The UHR Ti DRIE process significantly advances the state-of-the-art for Ti MEMS fabrication.
  • This breakthrough enables unprecedented miniaturization and functionality for Ti-based devices.
  • Opens new avenues for Ti MEMS, particularly in implantable medical devices.