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CVD transfer-free graphene for sensing applications.

Chiara Schiattarella¹, Sten Vollebregt², Tiziana Polichetti³

¹University of Naples "Federico II", Department of Physics "E. Pancini", Naples, Italy.

Beilstein Journal of Nanotechnology

|May 27, 2017

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This study presents a novel, transfer-free method for synthesizing graphene gas sensors. The graphene exhibits selective detection of nitrogen dioxide (NO2) and ammonia (NH3), paving the way for advanced electronic devices.

Area of Science:

Materials Science
Nanotechnology
Chemical Engineering

Background:

Carbon-based allotropes, particularly graphene, are highly conductive and possess large surface areas, making them ideal for gas sensing applications.
Traditional graphene synthesis often involves transfer steps that can introduce damage or contamination, limiting sensor performance.
Developing transfer-free fabrication methods is crucial for high-quality graphene-based electronic devices.

Purpose of the Study:

To present a novel transfer-free fabrication approach for synthesizing graphene for gas sensing.
To investigate the sensing properties of this graphene material towards hazardous gases like nitrogen dioxide (NO2), ammonia (NH3), and carbon monoxide (CO).
To demonstrate the potential of direct-growth graphene for integration into electronic devices.

Keywords:

CMOS-compatible process ammonia chemiresistors graphene nitrogen dioxide transfer-free growth

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Main Methods:

Multilayer graphene was synthesized using chemical vapor deposition (CVD) mediated by a CMOS-compatible molybdenum (Mo) catalyst.
A transfer-free approach was employed, utilizing pre-patterned Mo catalyst to control graphene film dimensions and shapes.
Gas sensing measurements were conducted in a humid nitrogen (N2) environment (500 sccm flow rate, 25 °C, 50% RH) by exposing the graphene devices to varying concentrations of NO2, NH3, and CO.

Main Results:

The graphene sensor showed an increased conductance response upon exposure to NO2.
A decreased signal was observed when the sensor was exposed to NH3.
The graphene material demonstrated no sensitivity to CO.
Selectivity was confirmed by analyzing adsorption and interaction energies for NO2 and NH3.

Conclusions:

The novel transfer-free CVD method enables the direct growth of high-quality graphene films suitable for gas sensing.
The synthesized graphene exhibits distinct and selective responses to NO2 and NH3, indicating its potential for detecting these hazardous gases.
This direct-growth approach offers a promising pathway for the seamless integration of graphene into various electronic applications, including advanced gas sensors.