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Gain-compensation Methodology for a Sinusoidal Scan of a Galvanometer Mirror in Proportional-Integral-Differential Control Using Pre-emphasis Techniques

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Internal Model-Based Robust Tracking Control Design for the MEMS Electromagnetic Micromirror.

Jiazheng Tan¹, Weijie Sun², John T W Yeow³

¹College of Automation Science and Engineering, South China University of Technology, Guangzhou 510000, China. 201520112765@mail.scut.edu.cn.

Sensors (Basel, Switzerland)

|June 8, 2017

Summary

This summary is machine-generated.

This study presents a robust controller for micro-electro-mechanical systems (MEMS) electromagnetic micromirrors, enabling precise tracking of command signals for scanning and imaging applications. Experimental validation confirms the controller

Keywords:

internal model micromirror output regulation problem robust tracking

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Area of Science:

Micro-electro-mechanical systems (MEMS) engineering
Control systems theory
Optical engineering

Background:

MEMS technology is crucial for scanning, imaging, and optical switching.
Electromagnetic micromirrors require accurate tracking of sinusoidal command signals for optimal performance.
Theoretical conversion of micromirror tracking to an output regulation problem.

Purpose of the Study:

To design a robust controller for MEMS electromagnetic micromirrors.
To achieve accurate tracking of command sinusoidal signals.
To develop a controller with minimal reliance on model accuracy.

Main Methods:

Application of the internal model principle for output regulation.
Design of a robust controller for precise signal tracking.
Experimental implementation and validation of the proposed controller.

Main Results:

The robust controller successfully forces the micromirror to track the command signal accurately.
The controller demonstrates high performance with minimal dependence on precise model parameters.
Experimental results confirm the effectiveness and satisfying performance of the designed controller.

Conclusions:

The internal model principle provides an effective solution for MEMS micromirror output regulation.
The developed robust controller enhances the accuracy and reliability of MEMS micromirror applications.
The controller's performance is validated through practical implementation and experimental testing.