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The Development of the Differential MEMS Vector Hydrophone
Guojun Zhang1, Mengran Liu2, Nixin Shen3
1Science and Technology on Electronic Test & Measurement Laboratory, North University of China, Taiyuan 030051, China. zhangguojun1977@nuc.edu.cn.
Sensors (Basel, Switzerland)
|June 9, 2017
Summary
This study introduces a novel differential MEMS vector hydrophone designed to minimize platform vibration and flow noise interference. The new hydrophone effectively receives acoustic signals while rejecting acceleration signals, improving underwater acoustic detection.
Area of Science:
- Acoustics
- Mechanical Engineering
- Sensor Technology
Background:
- MEMS vector hydrophones face significant interference from platform vibration and flow noise.
- Existing hydrophones struggle to simultaneously detect acoustic signals and reject acceleration noise.
Purpose of the Study:
- To develop a differential MEMS vector hydrophone capable of receiving acoustic signals and rejecting acceleration signals.
- To address the limitations of current MEMS vector hydrophones in noisy environments.
Main Methods:
- Theoretical analysis and simulation of the differential MEMS vector hydrophone.
- Fabrication and experimental testing of a prototype using a standing wave tube and vibration platform.
Main Results:
- The prototype exhibits high acoustic sensitivity (M = -185 dB @ 500 Hz).
- Achieved low acceleration sensitivity (M = -58 dB), a 17 dB improvement over previous designs.
- Demonstrated effective rejection of acceleration signals.
Conclusions:
- The differential MEMS vector hydrophone meets requirements for acoustic vector detection, even when rigidly fixed.
- This development lays the foundation for practical engineering applications of MEMS vector hydrophones.
- The device offers enhanced performance in rejecting unwanted acceleration noise.

