Position error correction of large-aperture aspherical in-position measurement

Area of Science:

• Optics and Photonics
• Metrology
• Optical Engineering

Background:

• Accurate calibration of aspherical surfaces is critical for optical system performance.
• Existing calibration methods often lack sufficient precision for demanding applications.
• In-position measurement calibration requires robust mathematical models to minimize errors.

Purpose of the Study:

• To propose an improved mathematical model for aspherical in-position measurement calibration.
• To enhance the precision of aspherical surface measurements.
• To validate the model's effectiveness through simulations and experimental testing.

Main Methods:

• Development of a hybrid calibration approach integrating hardware and software techniques.
• Utilizing a rough calibration step with hardware, followed by precise error reduction using software.
• Implementation of simulation experiments to demonstrate model efficacy.
• Experimental verification on a concave aspheric surface.

Main Results:

• The improved mathematical model successfully calibrates aspherical surfaces.
• Simulation experiments confirmed the model's effectiveness in error reduction.
• Experimental testing showed a significant reduction in measurement errors.
• Measurement errors for the concave aspheric mirror were reduced by approximately 2 μm after data processing.

Conclusions:

• The proposed hybrid calibration model offers enhanced accuracy for aspherical surface metrology.
• The integration of software-based error correction significantly improves measurement precision.
• This method provides a viable solution for achieving high-accuracy measurements of aspheric components.