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Fabrication of Low Temperature Carbon Nanotube Vertical Interconnects Compatible with Semiconductor Technology
Published on: December 7, 2015
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High-speed logic integrated circuits with solution-processed self-assembled carbon nanotubes
Shu-Jen Han1, Jianshi Tang1, Bharat Kumar1
1IBM Thomas J. Watson Research Center, Yorktown Heights, New York 10598, USA.
Nature Nanotechnology
|July 5, 2017
Summary
High-performance complementary carbon nanotube ring oscillators were created using manufacturable processes. These carbon nanotube field-effect transistors (CNFETs) demonstrate scalability beyond the 3-nm node, overcoming previous limitations in circuit complexity.
Area of Science:
- Materials Science
- Electrical Engineering
- Nanotechnology
Background:
- Conventional silicon technology faces challenges meeting demands for advanced nodes like 7-nm.
- Carbon nanotube field-effect transistors (CNFETs) show promise for scaling to 3-nm nodes and beyond.
- Previous CNFET circuits were limited to simple demonstrations, lacking practical logic technology aspects.
Purpose of the Study:
- To develop high-performance complementary carbon nanotube ring oscillators.
- To demonstrate the feasibility of manufacturable processes for complex CNFET circuits.
- To advance CNFET technology towards practical logic applications.
Main Methods:
- Fabrication of complementary carbon nanotube ring oscillators using solution-processed, self-assembled carbon nanotube arrays.
- Achieving over 99.9% semiconducting purity in the carbon nanotube arrays.
- Employing two different work function electrodes to create the complementary feature.
Main Results:
- Demonstrated high-performance complementary carbon nanotube ring oscillators.
- Achieved a stage switching frequency of 2.82 GHz.
- Utilized fully manufacturable processes for circuit fabrication.
Conclusions:
- Successfully created complex, high-performance logic circuits using carbon nanotubes.
- Overcame previous limitations in CNFET circuit functionality and manufacturability.
- Paved the way for advanced logic technologies beyond silicon using CNFETs.

