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Updated: Feb 27, 2026

Picometer-Precision Atomic Position Tracking through Electron Microscopy
Published on: July 3, 2021
Origin of atomic displacement in HAADF image of the tilted specimen
1Beijing National Laboratory of Condensed Matter Physics, Institute of Physics, Chinese Academy of Sciences, Beijing 100190, China; School of Physical Sciences, University of Chinese Academy of Science, Beijing 100049, China.
Abstract:
The effect of the tilt of the crystallographic orientation with respect to an incident electron probe on high-angle annular dark field (HAADF) imaging in aberration-corrected scanning transmission electron microscopy (STEM) is investigated in experiment and simulation. A small specimen tilt can lead to unequal deviations of different atom species in the HAADF image and result in further relative displacement between anion and cation. Simulated HAADF images also confirm that the crystal tilt causes an artifact in atom polarization. The effect is derived from the scattering abilities of different atoms.
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