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Laser Micromachining for Polymer Surface Topography Design
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Reconstruction of Laser-Induced Surface Topography from Electron Backscatter Diffraction Patterns.

Patrick G Callahan1, McLean P Echlin1, Tresa M Pollock1

  • 11Materials Department,University of California Santa Barbara,Santa Barbara,CA93106-5050USA.

Microscopy and Microanalysis : the Official Journal of Microscopy Society of America, Microbeam Analysis Society, Microscopical Society of Canada
|August 9, 2017
PubMed
Summary
This summary is machine-generated.

Surface topography can be reconstructed using electron backscatter diffraction (EBSD) patterns. This method, validated with atomic force microscopy (AFM), accurately maps laser-induced periodic surface structures without modifying EBSD systems.

Keywords:
Monte Carlo simulationEBSDfemtosecond lasersurface reconstructionsurface topography

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Area of Science:

  • Materials Science
  • Surface Science
  • Electron Microscopy

Background:

  • Surface topography characterization is crucial for understanding material properties.
  • Existing methods like Atomic Force Microscopy (AFM) can be time-consuming.
  • Electron Backscatter Diffraction (EBSD) is a widely available technique for crystallographic analysis.

Purpose of the Study:

  • To develop and validate a novel method for reconstructing surface topography using EBSD patterns.
  • To assess the capability of EBSD-based topography reconstruction for analyzing laser-induced periodic surface structures (LIPSS).
  • To demonstrate the applicability of this technique for in situ measurements.

Main Methods:

  • Utilizing the maximum background intensity in EBSD patterns to determine local surface normals.
  • Employing Monte Carlo simulations for correction of surface normal determination.
  • Reconstructing a surface height map from the calculated local surface normals.
  • Comparing EBSD-derived topography with Atomic Force Microscopy (AFM) data.

Main Results:

  • Successfully reconstructed the surface topography of a femtosecond laser-machined Nickel (Ni) sample.
  • The reconstructed topography accurately captured both low-frequency waviness and high-frequency ridges of LIPSS.
  • Reconstruction results from EBSD at 5 and 20 kV showed good agreement with AFM measurements.
  • The technique proved effective for analyzing complex surface structures.

Conclusions:

  • EBSD pattern analysis offers a viable, non-destructive method for surface topography reconstruction.
  • This technique can be implemented with standard EBSD systems, enhancing their utility.
  • The method shows promise for in situ monitoring of surface topography changes during experiments.