Simultaneous measurement of refractive index and temperature based on all-dielectric metasurface

In this paper, a novel kind of sensors for simultaneous measurement of refractive index and temperature based on all-dielectric metasurfaces is proposed. The metasurfaces are constructed by an array of silicon nanoblocks on top of the bulk fused silica substrate. We used three-dimensional full wave electromagnetic field simulation by finite integral method to accurately calculate the transmission spectrum of the metasurfaces. Two transmission dips corresponding to the electric and magnetic resonances are observed. Both dips shift as the ambient refractive index or the temperature changes. Simulation results show that the sensing sensitivities of two dips to the refractive index are 243.44 nm/RIU and 159.43 nm/RIU, respectively, while the sensitivities to the temperature are 50.47 pm/°C and 75.20 pm/°C, respectively. After introducing four holes into each silicon nanoblock, the electromagnetic field overlap in the surrounding medium can be further promoted, and the sensitivities to the refractive index increase to 306.71 nm/RIU and 204.27 nm/RIU, respectively. Our proposed sensors have advantages of polarization insensitive, small size, and low loss, which offer them high potential applications in physical, biological and chemical sensing fields.