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Concave silicon micromirrors for stable hemispherical optical microcavities.

Yiliang Bao, Feng Zhou, Thomas W LeBrun

|August 10, 2017

Summary

This summary is machine-generated.

Researchers fabricated silicon concave micromirrors for hemispherical microcavities, achieving greater depths and nanometer-level roughness. This advancement enhances frequency stability and insensitivity for mode coupling optics.

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Area of Science:

Optics and Photonics
Materials Science
Microfabrication

Background:

Hemispherical microcavities are crucial for applications requiring high frequency stability.
Fabrication of silicon concave micromirrors presents challenges in achieving desired depth, roughness, and aspect ratios.
Previous methods limited achievable cavity depths, impacting performance.

Purpose of the Study:

To present a detailed study on the fabrication of silicon concave micromirrors for hemispherical microcavities.
To investigate key fabrication parameters including yield, surface quality, roughness, cavity depth, radius of curvature, and aspect ratio.
To demonstrate the possibility of achieving larger cavity depths than previously reported.

Main Methods:

Detailed fabrication process for silicon concave micromirrors.
Characterization of surface quality, roughness, cavity depth, and radius of curvature.
Analysis of aspect ratio (cavity depth to radius of curvature).
Assembly of hemispherical microcavities using fabricated micromirrors.

Main Results:

Achieved significantly larger cavity depths compared to prior reports.
Maintained desirable aspect ratios and nanometer-level surface roughness.
Demonstrated high finesse (F = 1524) and quality factor (Q = 3.78 x 10^5) in assembled microcavities.
Improved insensitivity to fabrication variations for mode coupling optics.

Conclusions:

The presented fabrication method enables larger cavity depths for silicon concave micromirrors.
These micromirrors lead to enhanced frequency stability and robustness in hemispherical microcavities.
The achieved high finesse and quality factor validate the performance of the fabricated micromirrors.